• Skip to WISTA Sites
  • Skip to Main menu
  • Skip to Page content
WISTA Logo
  • WISTA
  • WISTA.Plan
  • WISTA.Service
  • Adlershof
  • Charlottenburg
  • South West
  • Marzahn
WISTA direkt
Search
  • de
  • en
  • WISTA Logo
  • About
    • Mission / Management
      • Company Profile
      • Team
      • Boards
      • Annual Reports
      • Invitations to tender
    • Sustainability / Diversity
    • Subsidiaries
    • Directions
  • News / Press
    • Overview
    • News
    • Events / Calendar
      • Diversity Conference Adlershof
    • Social Media Wall
    • Press
    • Magazine "Potenzial"
    • Adlershof Journal
    • Downloads
  • Services
    • All WISTA services
    • Business programmes
      • Adlershof Founder's Lab
    • Networks / Cooperations
    • Talent promotion / Recruiting
    • Event and Visitors Service
  • Projects
    • Focus Topics
    • Team Innovation
  • Sites
    • Overview
    • Technology Park Adlershof
    • Innovation Centre CHIC Charlottenburg
    • Innovation Campus FUBIC South West
    • CleanTech Business Park Marzahn
    • Business Office “Zukunftsorte”
  • Real Estate
    • Current Real Estate Offers
    • ST3AM Working Environments
    • Facility Management
  • Talents
    • Overview
    • WISTA as Employer
      • Jobs
    • WISTA Academy
      • Overview
    • Talent Promotion / Training
  • WISTA
  • WISTA.Plan
  • WISTA.Service
  • Adlershof
  • Charlottenburg
  • South West
  • Marzahn
WISTA direkt

News / Press

  • Overview
  • News
  • Events / Calendar
  • Social Media Wall
  • Press
  • Magazine "Potenzial"
  • Adlershof Journal
  • Downloads
  • Editorial Staff
  • WISTA
  • News / Press
10. November 2023

New beamline for VUV radiometry

Physikalisch-Technische Bundesanstalt increases availability for different measurement tasks at the Metrology Light Source

Design schematic of the VUVR beamline, top right: monochromator grating during adjustment © PTB
Design schematic of the VUVR beamline, top right: monochromator grating during adjustment © PTB

A new beamline for radiometry in the vacuum ultraviolet spectral range (VUVR) was successfully commissioned at the Metrology Light Source (MLS). By quickly redirecting the radiation to three different measuring stations, the availability for different measuring tasks is significantly increased.

The new beamline offers dedicated beamline branches for radiometric calibration of radiation receivers, characterisation of optical materials and components (reflectometry), and investigation of complex (imaging) detection systems and spectrometers.

The wavelength range between 40 nm and 200 nm, i.e. the spectral ranges of ultraviolet radiation (UV), "deep" UV and vacuum ultraviolet (VUV), are gaining industrial interest in addition to their importance for basic research, e.g. for increasing the spatial resolution of "classical" optical metrology for the inspection of wafer structures in semiconductor manufacturing and as an "out-of-band" spectral range in EUV lithography. Typical applications in the industrial sector are in material investigations and the characterisation of optical systems. Basic research-oriented measurements are e.g. investigations on photoelectron tomography as well as the characterisation of spectroscopic satellite instrumentation for astrophysics.

Publication:

Journal of Physics: Conference Series
The new PTB beamline for vacuum-ultraviolet radiometry
O. Ogor, U. Kroth, H. Kaser, M. Krzyzagorski and A. Gottwald
DOI 10.1088/1742-6596/2380/1/012032

Contact:

Alexander Gottwald
Physikalisch-Technische Bundesanstalt
Working Group 7.13: UV and VUV Radiometry
alexander.gottwald(at)ptb.de

 

Press release PTB, 8 November 2023

Research Analytics Photonics / Optics

Related News

Agreement on EUV reflectometry between PTB and ZEISS extended until the end of 2029

Cooperation strengthens the European technology network

Related Institutions

  • Physikalisch-Technische Bundesanstalt PTB
  • LinkedInshare0
  • Facebookshare0
  • WhatsAppshare0
  • E-Mail
  • © WISTA Management GmbH
  • Legal Notice
  • Privacy Policy
  • Contact
  • Career
  • Press
  • Social Media Guide
Member of:
Zukunftsorte Logo